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Design of a New Rotary Micropositioning Stage Driven by Piezoelectric Actuator
Hanlun Zhang; Qingsong Xu
2019-07
Conference Name19th IEEE International Conference on Nanotechnology, NANO 2019
Source PublicationProceedings of the IEEE Conference on Nanotechnology
Volume2019-July
Pages188-192
Conference Date22-26 July 2019
Conference PlaceMacao, China
CountryChina
Abstract

This paper presents the design of a new rotary micropositioning stage, which is actuated by a linear-type piezoelectric stack actuator. This structure realizes a large enough output angle by introducing lever displacement amplifiers. This work also includes innovative designs for accepting the force and displacement of PZT. Moreover, it avoids undesired displacement by adopting symmetrical structure design. The proposed design also exhibits a compact structure, which provides convenience in practical application. Finite-element analysis is conducted with simulation study to verify the performance of the presented rotary micropositioning stage.

DOI10.1109/NANO46743.2019.8993869
URLView the original
Indexed ByCPCI-S
Language英語English
WOS Research AreaEngineering ; Science & Technology - Other Topics
WOS SubjectEngineering, Electrical & Electronic ; Nanoscience & Nanotechnology
WOS IDWOS:000703919400034
The Source to Articlehttps://ieeexplore.ieee.org/document/8993869
Scopus ID2-s2.0-85081052682
Fulltext Access
Citation statistics
Document TypeConference paper
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Corresponding AuthorQingsong Xu
AffiliationDepartment of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Macau, China
First Author AffilicationFaculty of Science and Technology
Corresponding Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Hanlun Zhang,Qingsong Xu. Design of a New Rotary Micropositioning Stage Driven by Piezoelectric Actuator[C], 2019, 188-192.
APA Hanlun Zhang., & Qingsong Xu (2019). Design of a New Rotary Micropositioning Stage Driven by Piezoelectric Actuator. Proceedings of the IEEE Conference on Nanotechnology, 2019-July, 188-192.
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