Residential College | false |
Status | 已發表Published |
Design of a New Rotary Micropositioning Stage Driven by Piezoelectric Actuator | |
Hanlun Zhang; Qingsong Xu | |
2019-07 | |
Conference Name | 19th IEEE International Conference on Nanotechnology, NANO 2019 |
Source Publication | Proceedings of the IEEE Conference on Nanotechnology |
Volume | 2019-July |
Pages | 188-192 |
Conference Date | 22-26 July 2019 |
Conference Place | Macao, China |
Country | China |
Abstract | This paper presents the design of a new rotary micropositioning stage, which is actuated by a linear-type piezoelectric stack actuator. This structure realizes a large enough output angle by introducing lever displacement amplifiers. This work also includes innovative designs for accepting the force and displacement of PZT. Moreover, it avoids undesired displacement by adopting symmetrical structure design. The proposed design also exhibits a compact structure, which provides convenience in practical application. Finite-element analysis is conducted with simulation study to verify the performance of the presented rotary micropositioning stage. |
DOI | 10.1109/NANO46743.2019.8993869 |
URL | View the original |
Indexed By | CPCI-S |
Language | 英語English |
WOS Research Area | Engineering ; Science & Technology - Other Topics |
WOS Subject | Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology |
WOS ID | WOS:000703919400034 |
The Source to Article | https://ieeexplore.ieee.org/document/8993869 |
Scopus ID | 2-s2.0-85081052682 |
Fulltext Access | |
Citation statistics | |
Document Type | Conference paper |
Collection | DEPARTMENT OF ELECTROMECHANICAL ENGINEERING |
Corresponding Author | Qingsong Xu |
Affiliation | Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Macau, China |
First Author Affilication | Faculty of Science and Technology |
Corresponding Author Affilication | Faculty of Science and Technology |
Recommended Citation GB/T 7714 | Hanlun Zhang,Qingsong Xu. Design of a New Rotary Micropositioning Stage Driven by Piezoelectric Actuator[C], 2019, 188-192. |
APA | Hanlun Zhang., & Qingsong Xu (2019). Design of a New Rotary Micropositioning Stage Driven by Piezoelectric Actuator. Proceedings of the IEEE Conference on Nanotechnology, 2019-July, 188-192. |
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