This chapter presents the design and verification of a digital sliding-mode prediction control (DSMPC) scheme for precise position control of piezoelectric micro-/nanopositioning systems. Its implementation only needs input/output measurements, whereas the burdens on hysteresis modeling and state observer design are released. As compared with DSMC, the DSMPC is capable of further attenuating the positioning error through an optimal control, which is provided by the predictive control strategy. Its stability is proved, and the ultimate tracking error bounds are evaluated analytically. The feasibility of the control scheme is validated by experimental investigations on a piezo-driven micropositioning device.