Residential College | false |
Status | 已發表Published |
Design and analysis of an in-plane flexure XYZ micro/nano-positioning stage | |
Xiaozhi Zhang; Qingsong Xu | |
2016-10-27 | |
Conference Name | 2016 International Conference on Advanced Robotics and Mechatronics (ICARM) |
Source Publication | ICARM 2016 - 2016 International Conference on Advanced Robotics and Mechatronics |
Pages | 359-363 |
Conference Date | 18-20 Aug. 2016 |
Conference Place | Macau, China |
Abstract | This paper reports on a conceptual design for a modular XYZ micro/nano-positioning stage by employing bridge amplified flexure mechanism and piezoelectric actuators. The mechanism design and analysis of a new terse parallel flexure stage with three translational degrees-of-freedom (DOF) is presented. The FEA simulation of dynamics analysis and fatigue analysis are conducted to reveal the capacity of the stage. Due to a larger enlargement ratio of the amplifier of bridge type and prismatic joints with good decoupling property, the XYZ micro/nano-positioning stage exhibits a large almost-decoupled motion along three working axes. Moreover, the application of modular design reduces the cost for repair and replacing. The capacities of the reported design are validated by performing simulation study. |
DOI | 10.1109/ICARM.2016.7606946 |
URL | View the original |
Indexed By | SCIE |
WOS Research Area | Engineering ; Robotics |
WOS Subject | Engineering, Electrical & Electronic ; Robotics |
WOS ID | WOS:000386653600062 |
Scopus ID | 2-s2.0-84999040086 |
Fulltext Access | |
Citation statistics | |
Document Type | Conference paper |
Collection | DEPARTMENT OF ELECTROMECHANICAL ENGINEERING |
Corresponding Author | Qingsong Xu |
Affiliation | Department of Electromechanical Engineering, Faculty of Science and Technology University of Macau |
First Author Affilication | Faculty of Science and Technology |
Corresponding Author Affilication | Faculty of Science and Technology |
Recommended Citation GB/T 7714 | Xiaozhi Zhang,Qingsong Xu. Design and analysis of an in-plane flexure XYZ micro/nano-positioning stage[C], 2016, 359-363. |
APA | Xiaozhi Zhang., & Qingsong Xu (2016). Design and analysis of an in-plane flexure XYZ micro/nano-positioning stage. ICARM 2016 - 2016 International Conference on Advanced Robotics and Mechatronics, 359-363. |
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