Residential College | false |
Status | 已發表Published |
Mechanism design of a compact XYZ parallel flexure stage | |
Zhang X.; Xu Q. | |
2015-09-28 | |
Conference Name | 2015 IEEE International Conference on Information and Automation, ICIA 2015 - In conjunction with 2015 IEEE International Conference on Automation and Logistics |
Source Publication | 2015 IEEE International Conference on Information and Automation, ICIA 2015 - In conjunction with 2015 IEEE International Conference on Automation and Logistics |
Pages | 953-957 |
Conference Date | 8-10 August 2015 |
Conference Place | Yunnan |
Country | China |
Abstract | This paper reports on the mechanism design of a compact XYZ parallel flexure sage. First, a new bridge-principle amplifier is proposed by a serial connection of two fundamental bridge amplifiers. Then, a comparison study of three displacement amplifiers in terms of one-stage, two-stage, and three-stage amplifiers is conducted by performing finite-element analysis (FEA) simulations. Owing to a larger amplification ratio, the two-stage amplifier is then employed to devise an XYZ parallel stage with decoupled motion. The stage is driven by three PZTs. By connecting the actuators with flexure output platform using the amplifiers, an XYZ stage with decoupled motions in X, Y and Z axes is obtained. The performance of the designed stage is verified by carrying out several FEA simulation studies. |
Keyword | Decouple Fea Simulation Flexure Hinge Two-stage Amplifier Xyz Nano-positioning Stage |
DOI | 10.1109/ICInfA.2015.7279424 |
URL | View the original |
Indexed By | SCIE |
Language | 英語English |
WOS Research Area | Automation & Control Systems ; Engineering |
WOS Subject | Automation & Control Systems ; Engineering, Electrical & Electronic |
WOS ID | WOS:000380562200176 |
Scopus ID | 2-s2.0-84959878730 |
Fulltext Access | |
Citation statistics | |
Document Type | Conference paper |
Collection | DEPARTMENT OF ELECTROMECHANICAL ENGINEERING |
Corresponding Author | Zhang X.; Xu Q. |
Affiliation | Department of Electromechanical Engineering, University of Macau, Macao |
First Author Affilication | University of Macau |
Corresponding Author Affilication | University of Macau |
Recommended Citation GB/T 7714 | Zhang X.,Xu Q.. Mechanism design of a compact XYZ parallel flexure stage[C], 2015, 953-957. |
APA | Zhang X.., & Xu Q. (2015). Mechanism design of a compact XYZ parallel flexure stage. 2015 IEEE International Conference on Information and Automation, ICIA 2015 - In conjunction with 2015 IEEE International Conference on Automation and Logistics, 953-957. |
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