Residential College | false |
Status | 已發表Published |
Precision control of piezoelectric actuator using fuzzy feedback control with inverse hysteresis compensation | |
Chi, Ziqiang; Xu, Qingsong | |
2015-04 | |
Conference Name | IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) |
Source Publication | 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015 |
Pages | 219-224 |
Conference Date | APR 07-11, 2015 |
Conference Place | Xian, PEOPLES R CHINA |
Abstract | Piezoelectric actuators are widely employed in nanopositioning applications. The main drawback of piezoelectric actuator is the hysteresis characteristics. This paper presents the precision control of the output displacement for a piezoelectric actuator through fuzzy feedback control combined with inverse model-based feedforward compensation. Firstly, the Preisach model is established to describe the hysteresis of piezoelectric actuator. Then, a feedforward compensator is designed using an input correction iteration algorithm. Afterwards, three kinds of fuzzy control methods including fuzzy control, two-input fuzzy PID control, and three-input fuzzy PID control are designed and realized, and numerical simulation experiments are carried out, respectively. Through a comparative study of the numerical results, the advantages and disadvantages of each kind of fuzzy control method are disclosed. |
Keyword | Feedforward Compensation Fuzzy Control Hysteresis Characteristics Piezoelectric Actuator Preisach Model |
DOI | 10.1109/NEMS.2015.7147414 |
URL | View the original |
Indexed By | CPCI-S |
Language | 英語English |
WOS Research Area | Science & Technology - Other Topics ; Instruments & Instrumentation |
WOS Subject | Nanoscience & Nanotechnology ; Instruments & Instrumentation |
WOS ID | WOS:000380505700056 |
Scopus ID | 2-s2.0-84939485479 |
Fulltext Access | |
Citation statistics | |
Document Type | Conference paper |
Collection | DEPARTMENT OF ELECTROMECHANICAL ENGINEERING |
Corresponding Author | Xu, Qingsong |
Affiliation | Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Avenida da Universidade, Taipa, Macau, China |
First Author Affilication | Faculty of Science and Technology |
Corresponding Author Affilication | Faculty of Science and Technology |
Recommended Citation GB/T 7714 | Chi, Ziqiang,Xu, Qingsong. Precision control of piezoelectric actuator using fuzzy feedback control with inverse hysteresis compensation[C], 2015, 219-224. |
APA | Chi, Ziqiang., & Xu, Qingsong (2015). Precision control of piezoelectric actuator using fuzzy feedback control with inverse hysteresis compensation. 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015, 219-224. |
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