Residential College | false |
Status | 已發表Published |
Design of a new compliant XY micro-positioning stage based on Roberts mechanism | |
Wan S.; Xu Q. | |
2014-10 | |
Conference Name | 2014 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) |
Source Publication | 2014 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2014 - Conference Proceedings |
Pages | 139-144 |
Conference Date | OCT 27-31, 2014 |
Conference Place | Taipei, TAIWAN |
Abstract | Compliant micro-positioning mechanisms play an important role in precise positioning and displacement technology. In this paper, a new kind of compliant mechanism based on Roberts mechanisms is proposed for the mechanism design of a novel parallel-kinematic XY micro-positioning stage. Pseudo-rigid-body model (PRBM) is developed to establish the quantitative models, which show that the XY stage has a work range larger than 14 mm in each axis with a relative compact dimension. Moreover, the stage performances are verified by conducting finite-element analysis (FEA) simulation. Results not only validate the analytical models, but also demonstrate the nice decoupling performance of the designed XY stage. The FEA simulation results show that the parasitic motion in the non-working direction was less than 0.1% of the motion stroke. It indicates that the proposed design meets the requirements of a large stroke, high precision linear guiding mechanism. A prototype XY stage is fabricated for further investigation. |
Keyword | Compliant Mechanism Micro-positioning Pseudo Rigid Body Model (Prbm) Roberts Mechanisms Xy Stage |
DOI | 10.1109/3M-NANO.2014.7057337 |
URL | View the original |
Indexed By | CPCI-S |
WOS Research Area | Science & Technology - Other Topics |
WOS Subject | Nanoscience & Nanotechnology |
WOS ID | WOS:000380389000045 |
Scopus ID | 2-s2.0-84946691875 |
Fulltext Access | |
Citation statistics | |
Document Type | Conference paper |
Collection | DEPARTMENT OF ELECTROMECHANICAL ENGINEERING |
Corresponding Author | Xu Q. |
Affiliation | Universidade de Macau |
First Author Affilication | University of Macau |
Corresponding Author Affilication | University of Macau |
Recommended Citation GB/T 7714 | Wan S.,Xu Q.. Design of a new compliant XY micro-positioning stage based on Roberts mechanism[C], 2014, 139-144. |
APA | Wan S.., & Xu Q. (2014). Design of a new compliant XY micro-positioning stage based on Roberts mechanism. 2014 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2014 - Conference Proceedings, 139-144. |
Files in This Item: | There are no files associated with this item. |
Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.
Edit Comment