Residential College | false |
Status | 已發表Published |
Design and testing of a novel multi-stroke micropositioning system with variable resolutions | |
Xu Q. | |
2014-02-01 | |
Source Publication | Review of Scientific Instruments |
ISSN | 00346748 10897623 |
Volume | 85Issue:2 |
Abstract | Multi-stroke stages are demanded in micro-/nanopositioning applications which require smaller and larger motion strokes with fine and coarse resolutions, respectively. This paper presents the conceptual design of a novel multi-stroke, multi-resolution micropositioning stage driven by a single actuator for each working axis. It eliminates the issue of the interference among different drives, which resides in conventional multi-actuation stages. The stage is devised based on a fully compliant variable stiffness mechanism, which exhibits unequal stiffnesses in different strokes. Resistive strain sensors are employed to offer variable position resolutions in the different strokes. To quantify the design of the motion strokes and coarse/fine resolution ratio, analytical models are established. These models are verified through finite-element analysis simulations. A proof-of-concept prototype XY stage is designed, fabricated, and tested to demonstrate the feasibility of the presented ideas. Experimental results of static and dynamic testing validate the effectiveness of the proposed design. © 2014 AIP Publishing LLC. |
DOI | 10.1063/1.4866475 |
URL | View the original |
Indexed By | SCIE |
WOS Research Area | Instruments & Instrumentation ; Physics |
WOS Subject | Instruments & Instrumentation ; Physics, Applied |
WOS ID | WOS:000335919900288 |
Scopus ID | 2-s2.0-84894677191 |
Fulltext Access | |
Citation statistics | |
Document Type | Journal article |
Collection | DEPARTMENT OF ELECTROMECHANICAL ENGINEERING |
Corresponding Author | Xu Q. |
Affiliation | Universidade de Macau |
First Author Affilication | University of Macau |
Corresponding Author Affilication | University of Macau |
Recommended Citation GB/T 7714 | Xu Q.. Design and testing of a novel multi-stroke micropositioning system with variable resolutions[J]. Review of Scientific Instruments, 2014, 85(2). |
APA | Xu Q..(2014). Design and testing of a novel multi-stroke micropositioning system with variable resolutions. Review of Scientific Instruments, 85(2). |
MLA | Xu Q.."Design and testing of a novel multi-stroke micropositioning system with variable resolutions".Review of Scientific Instruments 85.2(2014). |
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