Residential College | false |
Status | 已發表Published |
A modular two-axis compliant parallel micropositioning stage with long travel range | |
Xu Q. | |
2013-12-01 | |
Conference Name | IEEE International Conference on Information and Automation (ICIA) |
Source Publication | 2013 IEEE International Conference on Information and Automation, ICIA 2013 |
Pages | 898-903 |
Conference Date | AUG 26-28, 2013 |
Conference Place | Yinchuan, PEOPLES R CHINA |
Publisher | IEEE, 345 E 47TH ST, NEW YORK, NY 10017 USA |
Abstract | Micropositioning systems with the properties of long travel range, compact physical size and high accuracy are required in many precision engineering applications. This paper presents the design, fabrication and testing of a novel two-axis compliant parallel-kinematics precision positioning stage with a centimeter stroke and compact size. Different from existing work, the presented stage owns a much compact dimension which is enabled by a concept of modular design. The proposed compact design permits positioning applications inside a constrained space. The stage performances in terms of motion range, stiffness and resonant frequency are verified through finite element analysis with simulations. A prototype is fabricated by using voice coil motors and laser displacement sensors for driving and sensing, respectively. Experimental results show that the stage is capable of submicron-resolution positioning with a range over 11 mm in each axis. Moreover, the stage exhibits negligible static and dynamic crosstalks, which are better than 0.75% and -33 dB, respectively. © 2013 IEEE. |
Keyword | Compliant Mechanisms Flexure Mechanisms Mechanism Design Precision Positioning |
DOI | 10.1109/ICInfA.2013.6720421 |
URL | View the original |
Indexed By | SCIE |
WOS Research Area | Automation & Control Systems ; Engineering |
WOS Subject | Automation & Control Systems ; Engineering, Electrical & Electronic |
WOS ID | WOS:000346483800162 |
Scopus ID | 2-s2.0-84894212047 |
Fulltext Access | |
Citation statistics | |
Document Type | Conference paper |
Collection | DEPARTMENT OF ELECTROMECHANICAL ENGINEERING |
Corresponding Author | Xu Q. |
Affiliation | Universidade de Macau |
First Author Affilication | University of Macau |
Corresponding Author Affilication | University of Macau |
Recommended Citation GB/T 7714 | Xu Q.. A modular two-axis compliant parallel micropositioning stage with long travel range[C]:IEEE, 345 E 47TH ST, NEW YORK, NY 10017 USA, 2013, 898-903. |
APA | Xu Q..(2013). A modular two-axis compliant parallel micropositioning stage with long travel range. 2013 IEEE International Conference on Information and Automation, ICIA 2013, 898-903. |
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