Residential College | false |
Status | 已發表Published |
Design and experiment of capacitive micromachined ultrasonic transducer array for high-frequency underwater imaging | |
Yu, Yuanyu1,2; Wang, Jiujiang1,2; Liu, Xin2,3; Pun, Sio H.2; Qiu, Weibao4; Zhang, Shuang1; Cheng, Ching H.5; Lei, Kin F.6,7; Vai, Mang I.2,3; Mak, Peng U.3 | |
2021 | |
Source Publication | Recent Advances in Electrical and Electronic Engineering |
ISSN | 2352-0965 |
Volume | 14Issue:2Pages:233-240 |
Abstract | Background: Ultrasound is widely used in the applications of underwater imaging. Capacitive micromachined ultrasonic transducer (CMUT) is a promising candidate for the traditional piezoelectric ultrasonic transducer. In underwater ultrasound imaging, better resolutions can be achieved with a higher frequency ultrasound. Therefore, a CMUT array for high-frequency ultrasound imaging is proposed in this work. Methods: Analytical methods were used to calculate the center frequency in water and the pull-in voltage for determining the operating point of CMUT. A finite element method model was developed to finalize the design parameters. The CMUT array was fabricated with a five-mask sacrificial release process. Results: The CMUT array owned an immersed center frequency of 2.6 MHz with a 6 dB fractional bandwidth of 123 %. The pull-in voltage of the CMUT array was 85 V. An underwater imaging experiment was carried out with the target of three steel wires. Conclusion: In this study, we have developed CMUT for high-frequency underwater imaging. The experiment showed that the CMUT could detect the steel wires with a diameter of 100 µm and the axial resolution was 0.582 mm, which was close to one wavelength of ultrasound in 2.6 MHz. |
Keyword | Capacitive Micromachined Ultrasonic Transducer Capacitive Micromachined Ultrasonic Transducer (Cmut) Device Design Sacrificial Release Process Underwater Imaging Zirconate Titanate |
DOI | 10.2174/2352096513999201026225123 |
URL | View the original |
Indexed By | ESCI |
Language | 英語English |
WOS Research Area | Engineering |
WOS Subject | Engineering, Electrical & Electronic |
WOS ID | WOS:000620367200010 |
Publisher | BENTHAM SCIENCE PUBL LTDEXECUTIVE STE Y-2, PO BOX 7917, SAIF ZONE, 1200 BR SHARJAH, U ARAB EMIRATES |
Scopus ID | 2-s2.0-85120080519 |
Fulltext Access | |
Citation statistics | |
Document Type | Journal article |
Collection | THE STATE KEY LABORATORY OF INTERNET OF THINGS FOR SMART CITY (UNIVERSITY OF MACAU) Faculty of Science and Technology DEPARTMENT OF ELECTROMECHANICAL ENGINEERING |
Corresponding Author | Wang, Jiujiang |
Affiliation | 1.Data Recovery Key Laboratory of Sichuan Province, College of Computer Science and AI, Neijiang Normal University, Neijiang, 641100, China 2.State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau, 999078, China 3.Faculty of Science and Technology, Department of Electrical and Computer Engineering, University of Macau, Macau, 999078, China 4.Shenzhen Key Laboratory of Ultrasound Imaging and Therapy Paul C. Lauterbur Research Center for Biomedical Imaging Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen, 518055, China 5.School of Automotive Engineering, Wuhan University of Technology, Wuhan, 430070, China 6.Graduate Institute of Biomedical Engineering, Chang Gung University, Taoyuan, 33302, Taiwan 7.Department of Radiation Oncology, Chang Gung Memorial Hospital, Linkou, 33305, Taiwan |
First Author Affilication | University of Macau |
Corresponding Author Affilication | University of Macau |
Recommended Citation GB/T 7714 | Yu, Yuanyu,Wang, Jiujiang,Liu, Xin,et al. Design and experiment of capacitive micromachined ultrasonic transducer array for high-frequency underwater imaging[J]. Recent Advances in Electrical and Electronic Engineering, 2021, 14(2), 233-240. |
APA | Yu, Yuanyu., Wang, Jiujiang., Liu, Xin., Pun, Sio H.., Qiu, Weibao., Zhang, Shuang., Cheng, Ching H.., Lei, Kin F.., Vai, Mang I.., & Mak, Peng U. (2021). Design and experiment of capacitive micromachined ultrasonic transducer array for high-frequency underwater imaging. Recent Advances in Electrical and Electronic Engineering, 14(2), 233-240. |
MLA | Yu, Yuanyu,et al."Design and experiment of capacitive micromachined ultrasonic transducer array for high-frequency underwater imaging".Recent Advances in Electrical and Electronic Engineering 14.2(2021):233-240. |
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