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Design and experiment of capacitive micromachined ultrasonic transducer array for high-frequency underwater imaging
Yu, Yuanyu1,2; Wang, Jiujiang1,2; Liu, Xin2,3; Pun, Sio H.2; Qiu, Weibao4; Zhang, Shuang1; Cheng, Ching H.5; Lei, Kin F.6,7; Vai, Mang I.2,3; Mak, Peng U.3
2021
Source PublicationRecent Advances in Electrical and Electronic Engineering
ISSN2352-0965
Volume14Issue:2Pages:233-240
Abstract

Background: Ultrasound is widely used in the applications of underwater imaging. Capacitive micromachined ultrasonic transducer (CMUT) is a promising candidate for the traditional piezoelectric ultrasonic transducer. In underwater ultrasound imaging, better resolutions can be achieved with a higher frequency ultrasound. Therefore, a CMUT array for high-frequency ultrasound imaging is proposed in this work. Methods: Analytical methods were used to calculate the center frequency in water and the pull-in voltage for determining the operating point of CMUT. A finite element method model was developed to finalize the design parameters. The CMUT array was fabricated with a five-mask sacrificial release process. Results: The CMUT array owned an immersed center frequency of 2.6 MHz with a 6 dB fractional bandwidth of 123 %. The pull-in voltage of the CMUT array was 85 V. An underwater imaging experiment was carried out with the target of three steel wires. Conclusion: In this study, we have developed CMUT for high-frequency underwater imaging. The experiment showed that the CMUT could detect the steel wires with a diameter of 100 µm and the axial resolution was 0.582 mm, which was close to one wavelength of ultrasound in 2.6 MHz.

KeywordCapacitive Micromachined Ultrasonic Transducer Capacitive Micromachined Ultrasonic Transducer (Cmut) Device Design Sacrificial Release Process Underwater Imaging Zirconate Titanate
DOI10.2174/2352096513999201026225123
URLView the original
Indexed ByESCI
Language英語English
WOS Research AreaEngineering
WOS SubjectEngineering, Electrical & Electronic
WOS IDWOS:000620367200010
PublisherBENTHAM SCIENCE PUBL LTDEXECUTIVE STE Y-2, PO BOX 7917, SAIF ZONE, 1200 BR SHARJAH, U ARAB EMIRATES
Scopus ID2-s2.0-85120080519
Fulltext Access
Citation statistics
Document TypeJournal article
CollectionTHE STATE KEY LABORATORY OF INTERNET OF THINGS FOR SMART CITY (UNIVERSITY OF MACAU)
Faculty of Science and Technology
DEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Corresponding AuthorWang, Jiujiang
Affiliation1.Data Recovery Key Laboratory of Sichuan Province, College of Computer Science and AI, Neijiang Normal University, Neijiang, 641100, China
2.State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau, 999078, China
3.Faculty of Science and Technology, Department of Electrical and Computer Engineering, University of Macau, Macau, 999078, China
4.Shenzhen Key Laboratory of Ultrasound Imaging and Therapy Paul C. Lauterbur Research Center for Biomedical Imaging Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen, 518055, China
5.School of Automotive Engineering, Wuhan University of Technology, Wuhan, 430070, China
6.Graduate Institute of Biomedical Engineering, Chang Gung University, Taoyuan, 33302, Taiwan
7.Department of Radiation Oncology, Chang Gung Memorial Hospital, Linkou, 33305, Taiwan
First Author AffilicationUniversity of Macau
Corresponding Author AffilicationUniversity of Macau
Recommended Citation
GB/T 7714
Yu, Yuanyu,Wang, Jiujiang,Liu, Xin,et al. Design and experiment of capacitive micromachined ultrasonic transducer array for high-frequency underwater imaging[J]. Recent Advances in Electrical and Electronic Engineering, 2021, 14(2), 233-240.
APA Yu, Yuanyu., Wang, Jiujiang., Liu, Xin., Pun, Sio H.., Qiu, Weibao., Zhang, Shuang., Cheng, Ching H.., Lei, Kin F.., Vai, Mang I.., & Mak, Peng U. (2021). Design and experiment of capacitive micromachined ultrasonic transducer array for high-frequency underwater imaging. Recent Advances in Electrical and Electronic Engineering, 14(2), 233-240.
MLA Yu, Yuanyu,et al."Design and experiment of capacitive micromachined ultrasonic transducer array for high-frequency underwater imaging".Recent Advances in Electrical and Electronic Engineering 14.2(2021):233-240.
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