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Study of the Electron Gas Behavior in an ECR Multipolar Plasma Source Conference paper
P. Mak, W. Tan, F.C. Sze, T.A. Grotjohn, J. Asmussen. Study of the Electron Gas Behavior in an ECR Multipolar Plasma Source[C], 1992.
Authors:  P. Mak;  W. Tan;  F.C. Sze;  T.A. Grotjohn;  J. Asmussen
Favorite | TC[Scopus]:0 | Submit date:2019/03/21
Ion and neutral energies in a multipolar electron cyclotron resonance plasma source Journal article
King G., Sze F.C., Mak P., Grotjohn T.A., Asmussen J.. Ion and neutral energies in a multipolar electron cyclotron resonance plasma source[J]. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1992, 10(4), 1265-1269.
Authors:  King G.;  Sze F.C.;  Mak P.;  Grotjohn T.A.;  Asmussen J.
Favorite | TC[WOS]:35 TC[Scopus]:29 | Submit date:2019/03/01