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2023 [1]
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A Nano-g MOEMS Accelerometer Featuring Electromagnetic Force Balance With 157-dB Dynamic Range
Journal article
Qu, Ziqiang, Ouyang, Hao, Xiong, Wen, Xu, Qiangwei, Wang, Yuan, Liu, Huafeng. A Nano-g MOEMS Accelerometer Featuring Electromagnetic Force Balance With 157-dB Dynamic Range[J]. IEEE TIE, 2023, 71(6), 6418-6426.
Authors:
Qu, Ziqiang
;
Ouyang, Hao
;
Xiong, Wen
;
Xu, Qiangwei
;
Wang, Yuan
; et al.
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TC[WOS]:
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Submit date：2023/08/08
Electromagnetic Closed-loop
Fabry-perot (F-p) Interference
Laser Demodulation
Micro-opto-electromechanical System (Moems)
