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2024 [1]
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A Novel Resonant MEMS Accelerometer Operating in Air with Thermally Actuated Piezoresistive Resonators
Conference paper
Wang, Chen, Quan, Aojie, Wang, Linlin, Esteves, Rui Amendoeira, Wang, Yuan, Madeira, Bernardo P., Guan, Yangyang, Wu, Xinyu, Kuznetsova, Nadezda, Shojaeian, Milad, Zhang, Pan, Mak, Pui In, Kraft, Michael. A Novel Resonant MEMS Accelerometer Operating in Air with Thermally Actuated Piezoresistive Resonators[C], 2024, 903-906.
Authors:
Wang, Chen
;
Quan, Aojie
;
Wang, Linlin
;
Esteves, Rui Amendoeira
;
Wang, Yuan
; et al.
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Submit date：2024/05/16
Microelectromechanical System (Mems) Accelerometer
Piezoresistive Resonators
Quality (q) Factor
Thermal Actuation
