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Design and Implementation of a Novel Compliant Rotary Micropositioning Stage Driven by Linear Voice Coil Motor
Journal article
Xu, Q.. Design and Implementation of a Novel Compliant Rotary Micropositioning Stage Driven by Linear Voice Coil Motor[J]. Review of Scientific Instruments, 2013, 055001-1-055001-8.
Authors:
Xu, Q.
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TC[WOS]:
35
TC[Scopus]:
43
IF:
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Submit date：2022/08/16
Compliance Control
Displacement Measurement
Finite Element Analysis
Measurement By Laser Beam
Micropositioning
Motion Measurement
Precision Engineering
Three-term Control
