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Towards True In-situ Temperature Compensation Utilizing Multiple Parameter Decoupling for Resonant MEMS Sensors Subject to Blue Sideband Excitation
Journal article
Xi, Jingqian, Zheng, Zhuoyue, Liu, Huafeng, Zhang, Pan, Zhao, Chun, Wang, Yuan, Wang, Chen, Kraft, Michael, Martins, Rui P., Mak, Pui In. Towards True In-situ Temperature Compensation Utilizing Multiple Parameter Decoupling for Resonant MEMS Sensors Subject to Blue Sideband Excitation[J]. IEEE Sensors Letters, 2024, 8(4), 2500804.
Authors:
Xi, Jingqian
;
Zheng, Zhuoyue
;
Liu, Huafeng
;
Zhang, Pan
;
Zhao, Chun
; et al.
Favorite
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TC[WOS]:
0
TC[Scopus]:
0
IF:
2.2
/
2.2
|
Submit date:2024/05/02
Blue-sideband Excitation (Bse)
Mechanical Sensors
Multiple Parameter Decoupling (Mpd)
Resonant Sensor
Temperature Compensation
Gas Sensors Based on 1 & 2-Dof Piezoelectric Baw MEMS Resonators with Coated ZIF-8
Conference paper
Wang, Linlin, Wang, Chen, Tietze, Max, Verstreken, Margot, Madeira, Bernardo P., Wang, Yuan, Chanut, Nicolas, Wang, Chenxi, Quan, Aojie, Ameloot, Rob, Kraft, Michael. Gas Sensors Based on 1 & 2-Dof Piezoelectric Baw MEMS Resonators with Coated ZIF-8[C]:IEEE345 E 47TH ST, NEW YORK, NY 10017 USA, 2024, 871-874.
Authors:
Wang, Linlin
;
Wang, Chen
;
Tietze, Max
;
Verstreken, Margot
;
Madeira, Bernardo P.
; et al.
Favorite
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TC[WOS]:
0
TC[Scopus]:
0
|
Submit date:2024/05/16
1 And 2-dof Bulk Acoustic Wave (Baw) Resonators
Ethanol Vapor Detection
Gas Sensor
Zeolitic Imidazolate Framework-8 (Zif-8)
On Extending Signal-to-Noise Ratio of Resonators for a MEMS Resonant Accelerometers Using Nonlinearity Compensation
Journal article
Li, Chengxin, Quan, Aojie, Zhang, Hemin, Wang, Chen, Wang, Linlin, Mert Torunbalci, Mustafa, Wang, Yuan, Kraft, Michael. On Extending Signal-to-Noise Ratio of Resonators for a MEMS Resonant Accelerometers Using Nonlinearity Compensation[J]. Journal of Microelectromechanical Systems, 2024, 33(5), 568-576.
Authors:
Li, Chengxin
;
Quan, Aojie
;
Zhang, Hemin
;
Wang, Chen
;
Wang, Linlin
; et al.
Favorite
|
TC[WOS]:
0
TC[Scopus]:
0
IF:
2.5
/
2.6
|
Submit date:2024/11/05
Dynamic Range
Nonlinear Effects
Nonlinearity Compensation
Resonant Accelerometer
Signal-to-noise Ratio
A Novel 3-DoF Mode Localized BAW Resonant Mass Sensor With High Quality Factor and Resolution
Journal article
Wang, Linlin, Quan, Aojie, Wang, Yuan, Pereira Madeira, Bernardo, Li, Chengxin, Kraft, Michael, Wang, Chen. A Novel 3-DoF Mode Localized BAW Resonant Mass Sensor With High Quality Factor and Resolution[J]. IEEE Transactions on Electron Devices, 2024, 71(8), 4926-4931.
Authors:
Wang, Linlin
;
Quan, Aojie
;
Wang, Yuan
;
Pereira Madeira, Bernardo
;
Li, Chengxin
; et al.
Favorite
|
TC[WOS]:
0
TC[Scopus]:
0
IF:
2.9
/
2.9
|
Submit date:2024/08/05
3-dof Coupled Bulk Acoustic Wave (Baw) Resonators
Mass Sensor
Mode Localization
Operation In Liquid
Quality Factor
1 and 2-DoF AlN-on-SOI BAW Disk MEMS Resonant Sensors Operated at Contour Mode
Journal article
Wang, Linlin, Wang, Chen, Quan, Aojie, Wang, Yuan, Wang, Chenxi, Kraft, Michael. 1 and 2-DoF AlN-on-SOI BAW Disk MEMS Resonant Sensors Operated at Contour Mode[J]. IEEE Sensors Journal, 2024, 24(15), 23640 - 23648.
Authors: ; et al.
Favorite
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TC[WOS]:
0
TC[Scopus]:
0
IF:
4.3
/
4.2
|
Submit date:2024/07/04
Contour Extensional Mode
Coupled Baw Mems Resonators
Mass Sensor
Mode Localization
Piezoelectric Transduction
Frequency-Comb-like Behavior in a Resonant MEMS Accelerometer Subject to Blue Sideband Excitation
Conference paper
Xi, Jingqian, Xu, Jiao, Zhang, Ziqian, Uka, Erion, Liu, Huafeng, Chen, Jianlin, Wang, Chen, Kraft, Michael, Mak, Pui In, Wang, Yuan, Zhao, Chun. Frequency-Comb-like Behavior in a Resonant MEMS Accelerometer Subject to Blue Sideband Excitation[C]:IEEE, 345 E 47TH ST, NEW YORK, NY 10017 USA, 2024.
Authors:
Xi, Jingqian
;
Xu, Jiao
;
Zhang, Ziqian
;
Uka, Erion
;
Liu, Huafeng
; et al.
Favorite
|
TC[WOS]:
0
TC[Scopus]:
0
|
Submit date:2024/05/16
Blue-sideband Excitation
Modal Coupling
Phononic Frequency Comb
Resonant Mems Accelerometer
A Novel Resonant MEMS Accelerometer Operating in Air with Thermally Actuated Piezoresistive Resonators
Conference paper
Wang, Chen, Quan, Aojie, Wang, Linlin, Esteves, Rui Amendoeira, Wang, Yuan, Madeira, Bernardo P., Guan, Yangyang, Wu, Xinyu, Kuznetsova, Nadezda, Shojaeian, Milad, Zhang, Pan, Mak, Pui In, Kraft, Michael. A Novel Resonant MEMS Accelerometer Operating in Air with Thermally Actuated Piezoresistive Resonators[C], 2024, 903-906.
Authors:
Wang, Chen
;
Quan, Aojie
;
Wang, Linlin
;
Esteves, Rui Amendoeira
;
Wang, Yuan
; et al.
Favorite
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TC[WOS]:
0
TC[Scopus]:
0
|
Submit date:2024/05/16
Microelectromechanical System (Mems) Accelerometer
Piezoresistive Resonators
Quality (q) Factor
Thermal Actuation
Multiple Parameter Decoupling for Resonant MEMS Sensors Exploiting Blue Sideband Excitation
Journal article
Jingqian Xi, Lei Xu, Yuan Wang, Huafeng Liu, Xingyin Xiong, Xudong Zou, Chengxin Li, Fangjing Hu, Chen Wang, Michael Kraft, Chun Zhao. Multiple Parameter Decoupling for Resonant MEMS Sensors Exploiting Blue Sideband Excitation[J]. Journal of Microelectromechanical Systems, 2023, 32(5), 426 - 436.
Authors:
Jingqian Xi
;
Lei Xu
;
Yuan Wang
;
Huafeng Liu
;
Xingyin Xiong
; et al.
Adobe PDF
|
Favorite
|
TC[WOS]:
6
TC[Scopus]:
6
IF:
2.5
/
2.6
|
Submit date:2023/08/03
Blue-sideband Excitation
Cross-sensitivity Suppression
Micromechanical Devices
Multiple Parameter Decoupling
Resonant Frequency
Resonant Mems Sensors
Sensitivity
Sensors
Temperature Measurement
Temperature Sensors
Vibrations
A Zeolitic Imidazolate Framework-8-Coated Coupled Resonant Gas Sensor
Journal article
Wang,Chenxi, Wang,Chen, Xia,Benzheng, Zhang,Hemin, Matavz,Aleksander, Wang,Yuan, Quan,Aojie, Wang,Linlin, Arnauts,Giel, Tu,Min, Ameloot,Rob, Kraft,Michael. A Zeolitic Imidazolate Framework-8-Coated Coupled Resonant Gas Sensor[J]. Journal of Microelectromechanical Systems, 2023, 32(4), 371 - 380.
Authors:
Wang,Chenxi
;
Wang,Chen
;
Xia,Benzheng
;
Zhang,Hemin
;
Matavz,Aleksander
; et al.
Favorite
|
TC[WOS]:
6
TC[Scopus]:
6
IF:
2.5
/
2.6
|
Submit date:2023/08/03
Zif-8
Coupled Resonant Sensor
Reversible Detection
Enhanced Sensitivity
Gas Sensing
A Mass Sensor Based on 3-DoF Mode Localized BAW Resonators with Enhanced Quality Factor and Resolution
Conference paper
Wang, Linlin, Wang, Chen, Quan, Aojie, Wang, Yuan, Wang, Chenxi, Madeira, Bernardo P., Li, Chengxin, Kraft, Michael. A Mass Sensor Based on 3-DoF Mode Localized BAW Resonators with Enhanced Quality Factor and Resolution[C], 2023, 533-536.
Authors:
Wang, Linlin
;
Wang, Chen
;
Quan, Aojie
;
Wang, Yuan
;
Wang, Chenxi
; et al.
Favorite
|
TC[Scopus]:
1
|
Submit date:2024/06/28
3-dof Coupled Baw Resonators
Mass Sensor
Mode Localization
Quality Factor